Technological advances in the field of MEMS have enabled significant reductions in sensor size and the ability to miniaturize these sensors. As a result, MEMS sensor-based modules can not only offer high cost performance but also integrate more functions like self-testing and accurate inspection procedures.
To monitor vehicle rollover, it's crucial to combine the sensor signal output from the gyroscope with the output signal of the low g value acceleration sensor. By processing signals from both sensors, the system algorithm determines the angle between the Z-axis and the vehicle's vertical line as well as the angular velocity ωx of the vehicle at each moment. This information enables the vehicle roll sensing algorithm to accurately identify the time point and position in time, which allows for deployment of specific airbags or actively tightening seat belts attached to the occupant for protection.
MEMS sensors are also vital in electronic stability program (ESP) systems, which enhance driving stability under all conditions. The sensor measures the vehicle's yaw rate and compares it with parameters such as steering angle and speed to detect situations of excessive or insufficient steering. If ESP activation is required during driving, the system will automatically brake the wheels separately. Thus, the signal provided by the sensor is fundamental to the execution of the ESP algorithm and key to improving driving stability.
Typically, MEMS yaw sensors consist of a capacitive silicon oscillator surrounded by a number of suspended mesh materials. External rotational motion perpendicular to the vibration axis causes the vibration surface to deviate, resulting in a change in capacitance that allows for precise operation.

Currently, the development trend of yaw sensors in automotive safety system applications is focused on high offset stability, vibration robustness, and full digital signal processing, which increase durability compared to analog sensors. Permanent proactive internal fault detection makes fault identification and proactive self-testing possible, thereby helping to boost reliability. Additionally, the flexible structure of the sensor string allows monitoring of yaw rate and acceleration in different vehicle directions, making it suitable for highly dynamic and sophisticated systems like electronic stability programs, rolling mitigation systems, electronic active control systems, and more. Combining yaw sensors with acceleration sensors to form an integrated sensor platform is a major development trend in automotive sensors.